PIglide RLA Rotation Stage With Air Bearings: A-68x
The directly driven flat rotation stages of the PIglide RLA series are designed for the highest precision. They have a low profile and a large, clear aperture. The RLA stages offer a superior travel accuracy, flatness, and wobble performance.
Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation. Application fields include tomography, beamline systems, wafer metrology, wafer inspection, measuring technology, inspection systems, calibration, scanning.
Additional Product Features:
- 365 mm diameter motion platform, 260 mm diameter aperture
- Low profile
- Eccentricity and flatness < 300 nm
For more information on this product, download the available datasheet.