The A-523 by PI is an air bearing Z tip/tilt stage with direct drive. The Z tip/tilt stage is ideally suited for high-precision applications including wafer inspection, fiber positioning, optics positioning, flat screen inspection, maskless lithography, and ultra-LED manufacturing.
This low-profile product is cleanroom compatible and high performing.
Additional Features Include:
- Travel range in Z to ±2.5 mm
- Rotation range in θX, θY to ±1°
- Load capacity to 8 kg
- Platform diameter 250 mm
- Overall height 60 mm
For more features and specifications on the A-523, download the available datasheet.