Piezo-Based Miniaturized Fast Steering Mirror Platforms (FSM) For Laser Beam Control: S-335
PI's new S-255 piezo fast steering mirror (FSM) offers millisecond response settling time, high dynamic linearity for precision image processing and image stabilization, laser beam steering, materials processing, and lithography. These FSM's are based on parallel-kinematic designs with coplanar rotational axes and a single moving platform, driven by two pairs of differential actuators that enable jitter-free, multi axis motion with excellent temperature stability.
The S-255 steering mirror platform provides precise angular tip/tilt motion of the top platform around two orthogonal axes. The single pivot-point design prevents the drawback of polarization rotation, which is common with conventional 2-axis stacked systems. When used with integrated EDM flexure based motion amplifiers, these stages provide an industry-leading tip/tilt angle up to 35mrad, equal to an optical deflection angle of 70mrad (4°). Included ID chip support allows for fast start-up and a simple data exchange between tip/tilt platforms and controllers.
For more features, specifications, and operational parameters on the S-335 FSM, download the available datasheet.